Dynamic Optical Techniques for IC Debug and Failure Analysis

Author

Ferrigno, Julie ; Desplats, Romain ; Perdu, Philippe ; Sanchez, Kevin ; Beaudoin, Félix ; Lewis, Dean

Author_Institution

Dept. of Electron. Anal., CNES, Toulouse

fYear

2006

fDate

3-7 July 2006

Firstpage

320

Lastpage

326

Abstract

Optical techniques (light emission and laser stimulation techniques) are routinely used for precise IC defect localization. At the early stage of an analysis, choosing the right technique is an increasingly complex task. In some cases, one technique may bring value but no the others. Using an 180nm test structure device we present results showing the complementary of emission microscopy (EMMI), time-resolved emission (TRE) and dynamic laser stimulation (DLS) in order to help failure analyists or debug engineers to choose the right approach

Keywords

failure analysis; integrated circuit reliability; integrated circuit testing; 180 nm; defect localization; dynamic laser stimulation; dynamic optical techniques; emission microscopy; failure analysis; integrated circuit debug; light emission; time-resolved emission; Automotive engineering; Circuit testing; Failure analysis; Microscopy; Photonic integrated circuits; Ring lasers; Stimulated emission; System testing; Timing; Vehicle dynamics;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the

Conference_Location

Singapore

Print_ISBN

1-4244-0205-0

Electronic_ISBN

1-4244-0206-9

Type

conf

DOI

10.1109/IPFA.2006.250980

Filename

4017079