• DocumentCode
    2730323
  • Title

    DC-Coupled Laser Induced Detection System for Fault Localization in Microelectronic Failure Analysis

  • Author

    Quah, A.C.T. ; Koh, L.S. ; Chua, C.M. ; Palaniappan, M. ; Chin, J.M. ; Phang, J.C.H.

  • Author_Institution
    Centre for Integrated Circuit Failure Anal. & Reliability, National Univ. of Singapore
  • fYear
    2006
  • fDate
    3-7 July 2006
  • Firstpage
    327
  • Lastpage
    332
  • Abstract
    This paper describes a new dc-coupled laser induced detection system for fault localization in microelectronic failure analysis. This method removes artifacts inherent in ac-coupled detection systems and is capable of producing an accurate mapping of the laser induced resistance change of the devices without signal attenuation. This method is also capable of localizing large area faults without signal distortion
  • Keywords
    electric resistance measurement; failure analysis; fault diagnosis; integrated circuit reliability; measurement by laser beam; dc-coupled laser induced detection system; fault localization; laser induced resistance change; microelectronic failure analysis; Circuit faults; Failure analysis; Fault detection; Laser noise; Laser transitions; Microelectronics; Optical beams; Power lasers; Thermal resistance; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2006. 13th International Symposium on the
  • Conference_Location
    Singapore
  • Print_ISBN
    1-4244-0205-0
  • Electronic_ISBN
    1-4244-0206-9
  • Type

    conf

  • DOI
    10.1109/IPFA.2006.250981
  • Filename
    4017080