Effect of nitrogen doping on electrical properties of amorphous carbon thin film prepared by aerosol-assisted thermal CVD

This paper reports on the effect of nitrogen doping of p-type semiconducting amorphous carbon (p-C) films fabricated onto the glass substrate by Aerosol-Assisted Thermal Chemical Vapor Deposition using natural source of camphor oil as the precursor material. From the characterization of the electrical properties using current-voltage (I-V) measurement, I-V graph was modeled. The analyze reveal that conductivity shows an increment in the N₂ doped thin film, both in dark and under illumination condition. Other than that, optical and structural properties were also characterized by using UV-VIS-NIR system and Atomic Force Microscopy. The same trend of optical and electrical can be seen when the measurement from the Tauc´s plot expose a decreasing value of optical band gap as temperature increase.