• DocumentCode
    2731417
  • Title

    Gold-Aluminum Intermetallic Formation Kinetics

  • Author

    Blish, Richard C., II ; Li, Susan ; Kinoshita, Hiro ; Morgan, Sheila ; Myers, Alline

  • Author_Institution
    Adv. Micro Devices, Inc., Sunnyvale, CA
  • fYear
    2006
  • fDate
    26-30 March 2006
  • Firstpage
    233
  • Lastpage
    242
  • Abstract
    Au-Al intermetallic compounds (IMC) grow laterally (Al-rich phases) in a Fickian fashion with an activation energy of 1.0 eV, but vertical IMC thickness (Au-rich phases) grows functionally as a power law on time with a sub-Fickian exponent of ~frac14, substantially smaller than what would be expected for bulk, lattice diffusion (1/2). We conclude from the IMC thickness time exponent that Au-rich IMC growth process is limited by grain boundary diffusion. The best bond lifetime was seen for an intermediate thickness Al film. The activation energy and lifetime for Au-rich phase growth are each a strong function of wire impurity concentrations. We find that bond lifetime varies roughly as the square root of Pd, Cu, Pt and As concentrations, but lifetime is not a function of Be, Ca, Fe or Cr concentration. We find a mixture of Au 4Al and Au on the Al-rich side of the failing interface
  • Keywords
    alloying; aluminium alloys; arsenic alloys; beryllium alloys; calcium alloys; chemical interdiffusion; chromium alloys; copper alloys; gold alloys; grain boundary diffusion; iron alloys; metallic thin films; palladium alloys; platinum alloys; reliability; surface chemistry; wires (electric); 1.0 eV; As; Au-Al; Be; Ca; Cr; Cu; Fe; Fickian fashion; Pd; Pt; activation energy; bond lifetime; failing interface; grain boundary diffusion; intermetallic formation kinetics; phase growth; wire impurity concentrations; Bonding; Chromium; Gold; Grain boundaries; Impurities; Intermetallic; Iron; Kinetic theory; Lattices; Wire;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    0-7803-9498-4
  • Electronic_ISBN
    0-7803-9499-2
  • Type

    conf

  • DOI
    10.1109/RELPHY.2006.251222
  • Filename
    4017163