Parylene C-based flexible interface for neuroprosthetic applications

Microfabricated microelectrode arrays are used to record and stimulate neurons and nerve axons in the central and peripheral nervous systems. Advances in silicon micromachining have brought forth new configurations of microelectrode structures, such as the Utah Electrode Array (UEA). This paper presents a novel monolithic integration technology to realize a flexible neural interface in which a biocompatible polymer (Parylene-C) mechanically connects the UEA and a100-channel implantable connector system (ICS-96). An integration concept for such a device was developed, and the materials and methods used to implement this concept were investigated. Thin film metal (Au) provides the electrical connection between the UEA and the ICS-96. Au metal traces are sandwiched between the Parylene-C layers. The vapor phase, room temperature polymerization of Parylene lends itself well to constructing extremely thin, flexible and pin-hole free polymer films free of additives.