Title :
On the Recovery of Simulated Plasma Process Induced Damage in High-κ Dielectrics
Author :
O´Sullivan, B.J. ; Pantisano, L. ; Roussel, P. ; Degraeve, R. ; Groeseneken, G. ; DeGendt, S. ; Heyns, M.
Author_Institution :
IMEC, Leuven
Abstract :
This work presents a detailed analysis of the ability of high-K materials to recover from plasma damage, as simulated by Fowler-Nordheim stress. Forming gas and high temperature rapid thermal anneal (RTA) steps are compared to determine their efficiency at trap recovery. The annealing responses of the technologically relevant HfSiON and HfO2 materials (EOT<2nm) are correlated with structural differences in these dielectrics, as well as the trap generation rate, centroids and defect de-passivation. We show that plasma damage can be successfully recovered for HfO2 by high temperature annealing
Keywords :
electron traps; hafnium compounds; high-k dielectric thin films; passivation; rapid thermal annealing; silicon compounds; Fowler-Nordheim stress; HfO2; HfSiON; RTA; defect depassivation; high-k dielectrics; plasma damage; rapid thermal annealing; trap generation rate; trap recovery; Analytical models; Hafnium oxide; High K dielectric materials; High-K gate dielectrics; Plasma materials processing; Plasma simulation; Plasma temperature; Rapid thermal annealing; Rapid thermal processing; Thermal stresses;
Conference_Titel :
Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-9498-4
Electronic_ISBN :
0-7803-9499-2
DOI :
10.1109/RELPHY.2006.251245
