DocumentCode
2732165
Title
Near-field sounding of multilayered media
Author
Gaikovich, Peter K.
Author_Institution
Inst. for Phys. of Microstructures, RAS, Nizhny Novgorod, Russia
fYear
2009
fDate
June 28 2009-July 2 2009
Firstpage
1
Lastpage
4
Abstract
A method of the coherent near-field sounding of layers´ parameters of a multilayered dielectric is proposed. It is based on the field measurements with the use of subwavelength probes (emitting and receiving) that are spaced above the upper layer of the studied structure. It makes possible to achieve a subwavelength resolution at the control of the layers´ depth. The developed approach can be used, for instance, for the monitoring of epitaxy of multilayered heterostructures using SNOM techniques.
Keywords
acoustic wave effects; dielectric materials; multilayers; near-field scanning optical microscopy; SNOM techniques; coherent near-field sounding; multilayered dielectric; multilayered heterostructures; multilayered media; subwavelength probes; subwavelength resolution; Dielectric measurements; Epitaxial growth; Green function; Impedance; Interferometry; Microstructure; Monitoring; Nonhomogeneous media; Physics; Probes; dielectric; multilayered structures; near-field sounding;
fLanguage
English
Publisher
ieee
Conference_Titel
Transparent Optical Networks, 2009. ICTON '09. 11th International Conference on
Conference_Location
Azores
Print_ISBN
978-1-4244-4825-8
Electronic_ISBN
978-1-4244-4827-2
Type
conf
DOI
10.1109/ICTON.2009.5185299
Filename
5185299
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