Title :
Effects of as-deposited CdTe microstructure on solar cell performance
Author :
Sestak, Michelle N. ; Li, Jian ; Chen, Jie ; Collins, Robert W.
Author_Institution :
Center for Photovoltaics Innovation & Commercialization, Univ. of Toledo, Toledo, OH, USA
Abstract :
In this study, two series of CdTe thin films were prepared by magnetron sputtering and analyzed in-situ using real time spectroscopic ellipsometry (RTSE). One series consists of CdTe thin films deposited at substrate temperatures ranging from 188°C to 304°C at a fixed Ar sputtering pressure of 18 mTorr, and the other consists of films deposited at pressures ranging from 2.5 to 50 mTorr at a fixed temperature of 230°C The RTSE data provide detailed information on nucleation and coalescence, as well as on the long term surface roughness development for these films. The results show that for films deposited at Ts ≥ 267°C and pAr<; 10 mTorr, initial growth occurs in the form of a thin bulk-like layer and is followed by clustering, whereas for films deposited at Ts ≤ 237°C and pAr> 10 mTorr, clustering occurs before any bulk-like layer forms. This behavior is consistent with trends observed at the end of the deposition to the extent that the final surface roughness is observed to decrease monotonically with temperature over the full range and to increase with pressure over the range from 2.5 to 18 mTorr. Trends identified by RTSE were confirmed through scanning electron and atomic force microscopies. In order to correlate the observed RTSE results with solar cell performance, devices fabricated by varying the Ar pressure for the CdTe layer were studied in detail. These devices were subjected to postdeposition CdCl2 treatments at 387°C for different times ranging from 15 to 35 minutes. Overall, the solar cells deposited at pAr = 10 mTorr exhibited the best overall performance, independent of treatment time. A further study of the optical properties of CdTe thin films deposited as a function of substrate temperature was undertaken in order to study differences in strain and grain size before and after a post-deposition CdCl2 t- - reatment. This study shows that a post-deposition CdCl2 treatment leads to a shift in the critical point energies to values which are closer to those of single crystal CdTe, hence resulting in a strain relaxation in the network.
Keywords :
II-VI semiconductors; atomic force microscopy; cadmium compounds; critical points; crystal microstructure; nucleation; optical properties; scanning electron microscopy; semiconductor thin films; solar cells; sputter deposition; substrates; surface roughness; Ar sputtering pressure; CdTe; atomic force microscopy; critical point energy; magnetron sputtering; microstructure; nucleation; optical properties; pressure 2.5 mtorr to 50 mtorr; real time spectroscopic ellipsometry; scanning electron microscopy; semiconductor thin films; solar cell performance; strain relaxation; substrate temperature; surface roughness; temperature 188 degC to 304 degC; temperature 387 degC; Atomic layer deposition; Conferences; Rough surfaces; Surface roughness;
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location :
Honolulu, HI
Print_ISBN :
978-1-4244-5890-5
DOI :
10.1109/PVSC.2010.5614120