Title :
Experimental results for 100 μm pitch TAB technology
Author :
Sugimoto, M. ; Yoshida, T. ; Sumi, Y. ; Hasegawa, H. ; Wada, K.
Author_Institution :
Fujitsu Labs. Ltd., Kawasaki, Japan
Abstract :
Fine line, high pin count TAB (tape automated bonding) has been demonstrated using a 13-mm2 test die with 100 μm pitch, and 484 gold bumps. Gold-tin eutectic bonding was carried out on the test die for both ILB (inner lead bonding) and OLB (outer lead bonding)
Keywords :
VLSI; lead bonding; packaging; semiconductor technology; 100 micron; Au-Sn; eutectic bonding; inner lead bonding; outer lead bonding; test die; Annealing; Automatic testing; Bonding; Fabrication; Gold; Pins; Production; Resists; Semiconductor device packaging; Wire;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1988, Fourth IEEE/CHMT European International
Conference_Location :
Neuilly sur Seine
DOI :
10.1109/EEMTS.1988.75953