Title :
Electro-optic polymer channel waveguide fabrication using multiphoton direct laser writing
Author :
Amirsolaimani, Babak ; Herrera, Oscar D. ; Himmelhuber, Roland ; Kieu, Khanh ; Norwood, Robert A. ; Peyghambarian, Nasser
Author_Institution :
Coll. of Opt. Sci., Univ. of Arizona, Tucson, AZ, USA
Abstract :
An all-reflective multiphoton microscope has been used for direct laser lithography and photo-bleaching of SEO250 EO polymer using a 1550nm femtosecond laser to fabricate 4μm channel waveguides. Waveguide loss and cladding index change have also been investigated.
Keywords :
electro-optical devices; high-speed optical techniques; laser materials processing; multiphoton processes; optical fabrication; optical losses; optical microscopy; optical polymers; optical saturable absorption; optical waveguides; photolithography; SEO250 EO polymer; all-reflective multiphoton microscopy; cladding index change; direct laser lithography; electro-optic polymer channel waveguide fabrication; femtosecond laser; multiphoton direct laser writing; photobleaching; waveguide loss; wavelength 1550 nm; Electrooptical waveguides; Optical device fabrication; Polymers; Ultrafast optics; Waveguide lasers; Writing;
Conference_Titel :
Optical Interconnects Conference (OI), 2015 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4799-8178-6
DOI :
10.1109/OIC.2015.7115701
