Title :
Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing
Author :
Guan, Timothy ; Kuang, Ye Chow ; Ooi, Melanie Po-Leen ; Cheah, Xiang Gin ; Tan, Yeung Shun ; Demidenko, Serge
Author_Institution :
Sch. of Eng., Monash Univ., Bandar Sunway, Malaysia
Abstract :
To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.
Keywords :
condition monitoring; failure analysis; maintenance engineering; mass production; materials handling equipment; process planning; semiconductor industry; strategic planning; test equipment; CBM strategy; data-driven condition-based maintenance; equipment failure pattern; manufacturing process planning; mass production; semiconductor manufacturing; test handlers; Condition monitoring; Control charts; Integrated circuits; Manufacturing; Reliability; condition based maintenance; control chart; semiconductor manufacturing; test handler;
Conference_Titel :
Electronic Design, Test and Application (DELTA), 2011 Sixth IEEE International Symposium on
Conference_Location :
Queenstown
Print_ISBN :
978-1-4244-9357-9
DOI :
10.1109/DELTA.2011.42
