Data-Driven Condition-Based Maintenance of Test Handlers in Semiconductor Manufacturing

Author

Guan, Timothy ; Kuang, Ye Chow ; Ooi, Melanie Po-Leen ; Cheah, Xiang Gin ; Tan, Yeung Shun ; Demidenko, Serge

Author_Institution

Sch. of Eng., Monash Univ., Bandar Sunway, Malaysia

fYear

2011

fDate

17-19 Jan. 2011

Firstpage

189

Lastpage

194

Abstract

To stay competitive, semiconductor manufacturers have come to acknowledge maintenance as an essential strategic element in manufacturing process planning. Condition-based maintenance (CBM) allows the maintenance strategy to be customised based on the equipment type and its failure pattern. Traditional CBM uses simple control charts, thus limiting its application to simple systems. This paper proposes the use of Data-driven CBM as a maintenance strategy for equipment in a semiconductor mass production environment.

Keywords

condition monitoring; failure analysis; maintenance engineering; mass production; materials handling equipment; process planning; semiconductor industry; strategic planning; test equipment; CBM strategy; data-driven condition-based maintenance; equipment failure pattern; manufacturing process planning; mass production; semiconductor manufacturing; test handlers; Condition monitoring; Control charts; Integrated circuits; Manufacturing; Reliability; condition based maintenance; control chart; semiconductor manufacturing; test handler;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Design, Test and Application (DELTA), 2011 Sixth IEEE International Symposium on

Conference_Location

Queenstown

Print_ISBN

978-1-4244-9357-9

Type

conf

DOI

10.1109/DELTA.2011.42

Filename

5729565