Undersampling approach for a capacitive micromachined yaw rate sensor

Micromachined inertial sensors offer new applications and opportunities for improved mobile devices. Especially the consumer market for micromechanical motion sensing through gyroscopes is widely emerging. The integration of inertial sensors within portable devices enforces suitable power management concepts to handle and achieve the tight power budget of the electronic devices. This paper presents a digital system approach to reduce the power consumption for a capacitive micromachined yaw rate sensor and enables an energy efficient frontend operation of the sensor.