Title :
High speed and high accuracy XY-stage for electronic assembly
Author :
Okamura, M. ; Watanabe, Manabu
Author_Institution :
Mitsubishi Electric, Hyogo
Abstract :
A high-speed, high-accuracy, direct-drive XY-stage developed XY to meet the requirements for LSI or print-circuit board assembly is discussed. This stage has a moving-coil-type linear motor using an NdFeB magnet, which is about 1.5 times as strong as SmCo5 rare-earth magnets. Computer aided engineering, including finite-element analysis, was applied to realize optimum design. A two-mode control method, consisting of a traveling mode and a positioning mode, has been developed to obtain stability and high speed positioning. Travel is 50 mm×50 mm, and maximum acceleration is 50 m/s2, which is five times as fast as conventional XY-stages
Keywords :
CAD/CAM; assembling; electronic engineering computing; finite element analysis; integrated circuit manufacture; large scale integration; linear motors; manufacturing computer control; position control; printed circuit manufacture; LSI; NdFeB; direct-drive XY-stage; electronic assembly; finite-element analysis; high speed positioning; moving-coil-type linear motor; optimum design; positioning mode; print-circuit board assembly; stability; traveling mode; two-mode control; Acceleration; Assembly; Bonding; Coils; Computer aided engineering; DC motors; Large scale integration; Microassembly; Servomechanisms; Servomotors;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1988, Fourth IEEE/CHMT European International
Conference_Location :
Neuilly sur Seine
DOI :
10.1109/EEMTS.1988.75966
