DocumentCode
2735414
Title
RF-sputtered ITO and ITO:Zr studied by in situ spectroscopic ellipsometry
Author
Burst, James M. ; Peshek, Timothy J. ; Gessert, Timothy A. ; Coutts, Timothy J. ; Li, Xiaonan ; Levi, Dean ; Weiss, Sharon M. ; Rogers, Bridget R.
Author_Institution
Nat. Center for Photovoltaics, Nat. Renewable Energy Lab., Golden, CO, USA
fYear
2010
fDate
20-25 June 2010
Abstract
We report results from in situ real-time spectroscopic ellipsometry (RT-SE) investigations into the sputter deposition and subsequent annealing behavior of permittivity-engineered transparent conductive oxide (TCO) films. RT-SE reveals information about the growth dynamics and evolution of the films´ electro-optical properties during deposition. We investigate the correlations of the ex situ optical and electrical measurements with structural analysis for select films.
Keywords
annealing; ellipsometry; sputter deposition; zirconium; ITO:Zr; RF sputtering; growth dynamics; in situ spectroscopic ellipsometry; sputter deposition; transparent conductive oxide films; Conductivity; Indium tin oxide; Optical films; Optical scattering; Sputtering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location
Honolulu, HI
ISSN
0160-8371
Print_ISBN
978-1-4244-5890-5
Type
conf
DOI
10.1109/PVSC.2010.5614289
Filename
5614289
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