Title :
Interface circuit for capacitive microaccelerometer
Author :
Liu, Minjie ; Zhang, Gang ; Dong, Jingxin ; Zhao, Changde
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing
Abstract :
This paper reports an interface circuit that provides an interface from capacitive MEMS sensors to other signal processing circuits. The interface circuit designed specially for capacitive accelerometer and gyroscopes applications is implemented in 0.35-mum 2P-4M CMOS process and measurement results that indicate the interface circuit resolves 7.3 aF of capacitance with a 1 MHz sampling rate and has a rough noise floor of 0.2 aF/Hz@1 KHz at ambient atmosphere are presented.
Keywords :
CMOS integrated circuits; accelerometers; capacitive sensors; microsensors; capacitance 7.3 aF; capacitive MEMS sensors; capacitive accelerometer; capacitive microaccelerometer; frequency 1 MHz; frequency 1 kHz; gyroscopes applications; interface circuit; signal processing circuits; size 0.35 micron; Accelerometers; Atmospheric measurements; CMOS process; Capacitance measurement; Capacitive sensors; Circuits; Gyroscopes; Micromechanical devices; Noise measurement; Signal processing;
Conference_Titel :
Circuits and Systems, 2008. MWSCAS 2008. 51st Midwest Symposium on
Conference_Location :
Knoxville, TN
Print_ISBN :
978-1-4244-2166-4
Electronic_ISBN :
1548-3746
DOI :
10.1109/MWSCAS.2008.4616884
