Title :
High performance cooling systems for advanced semiconductor equipment
Author :
Jacquelin, J. ; Fauve, P. ; Legrand, B.
Author_Institution :
Lab. de Marcoussis, France
Abstract :
Advances in efficient cooling systems for high power semiconductors are reviewed. These include processes, system schematics, advanced refrigerant fluids, computation methods and other aspects of thermal engineering in high voltage equipment
Keywords :
cooling; refrigeration; semiconductor devices; advanced refrigerant fluids; computation methods; efficient cooling systems; high power semiconductors; thermal engineering;
Conference_Titel :
Power Electronics and Variable-Speed Drives, Third International Conference on
Conference_Location :
London
Print_ISBN :
0-85296-364-5
