DocumentCode :
2736882
Title :
Large-scale and enhanced efficiency C-Si solar cell with moth-eye-like by using self-assembled lithography
Author :
Tsai, M.A. ; Chen, H.C. ; Wang, H.W. ; Tsai, Y.L. ; Tseng, P.C. ; Jang, C.Y. ; Yu, Peichen ; Kuo, H.C.
Author_Institution :
Dept. of Photonics, Nat. Chiao Tung Univ., Hsinchu, Taiwan
fYear :
2010
fDate :
20-25 June 2010
Abstract :
We demonstrated the Si solar cell with ladder-shaped nanorod array, fabricated by combined the self-assembled lithography and reactive-ion etching technique. The measurement of angular reflective spectrums of the solar cell with ladder-shaped nanorod array using an integration sphere remained lower at broadband spectra and large angle of incident compared to the solar cell with micro-textured surface. The I-V measurement shown the current density and conversion efficiency could be improved by the ladder-shaped nanorod array. The enhancement conversion efficiency approached to 34.54%.
Keywords :
current density; elemental semiconductors; lithography; nanorods; silicon; solar cells; sputter etching; angular reflective spectrum; conversion efficiency; current density; ladder-shaped nanorod array; reactive ion etching; self-assembled lithography; solar cells; Broadband communication; Gallium arsenide; Optical reflection; Process control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Photovoltaic Specialists Conference (PVSC), 2010 35th IEEE
Conference_Location :
Honolulu, HI
ISSN :
0160-8371
Print_ISBN :
978-1-4244-5890-5
Type :
conf
DOI :
10.1109/PVSC.2010.5614423
Filename :
5614423
Link To Document :
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