Spatial scanning-probe array system for silicon-on-insulator integrated circuits

Author

Yang, Wen-Ren

Author_Institution

Dept. of Electr. Eng., Changhua Univ. of Educ., Changhua

fYear

2008

fDate

10-13 Aug. 2008

Firstpage

910

Lastpage

913

Abstract

A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical signal is also proposed and simulated.

Keywords

VLSI; crack detection; discrete wavelet transforms; electro-optical effects; integrated circuit testing; optical signal detection; silicon-on-insulator; SOI die cracks detection; Si-SiO₂; VLSI; discrete wavelet transform; electrooptic probing methods; post signal processing; scattered optical signal; silicon-on-insulator integrated circuits; spatial scanning-probe array system; surface examination; very large scaled integrated circuits; Circuits; Discrete wavelet transforms; Optical arrays; Optical crosstalk; Optical pulse generation; Optical scattering; Probes; Resonance light scattering; Sampling methods; Silicon on insulator technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2008. MWSCAS 2008. 51st Midwest Symposium on

Conference_Location

Knoxville, TN

ISSN

1548-3746

Print_ISBN

978-1-4244-2166-4

Electronic_ISBN

1548-3746

Type

conf

DOI

10.1109/MWSCAS.2008.4616948

Filename

4616948