Title :
Spatial scanning-probe array system for silicon-on-insulator integrated circuits
Author_Institution :
Dept. of Electr. Eng., Changhua Univ. of Educ., Changhua
Abstract :
A spatial scanning-probe array system for silicon-on-insulator (SOI) integrated circuit is proposed in this paper. The operating fundamentals, specifications, and simulations are presented in this paper. The proposed system is designed to scan the circuit in order to examine the surface and detect die cracks. The post signal processing by using discrete wavelet transform (DWT) for scattered optical signal is also proposed and simulated.
Keywords :
VLSI; crack detection; discrete wavelet transforms; electro-optical effects; integrated circuit testing; optical signal detection; silicon-on-insulator; SOI die cracks detection; Si-SiO2; VLSI; discrete wavelet transform; electrooptic probing methods; post signal processing; scattered optical signal; silicon-on-insulator integrated circuits; spatial scanning-probe array system; surface examination; very large scaled integrated circuits; Circuits; Discrete wavelet transforms; Optical arrays; Optical crosstalk; Optical pulse generation; Optical scattering; Probes; Resonance light scattering; Sampling methods; Silicon on insulator technology;
Conference_Titel :
Circuits and Systems, 2008. MWSCAS 2008. 51st Midwest Symposium on
Conference_Location :
Knoxville, TN
Print_ISBN :
978-1-4244-2166-4
Electronic_ISBN :
1548-3746
DOI :
10.1109/MWSCAS.2008.4616948
