DocumentCode
2737437
Title
The Fabrication of THz Photonic Filters Using Ultraviolet Based SU8 Micromachining
Author
Gallant, A.J. ; Levitt, J.A. ; Swift, G.P. ; Dai, D.C. ; Kaliteevski, M. ; Wood, D. ; Petty, M.C. ; Chamberlain, J.M.
Author_Institution
Durham Univ., Durham
fYear
2006
fDate
18-22 Sept. 2006
Firstpage
194
Lastpage
194
Abstract
Here we report on the development of an ultraviolet (UV) based exposure technique for the fabrication of high aspect ratio metallic pillar arrays. These arrays act as photonic band gap based filters. Completed structures show a relative transmission of up to 97% in the main pass band centred at 1.25 THz.
Keywords
band-pass filters; micromachining; photonic band gap; submillimetre wave filters; THz photonic filter fabrication; frequency 1.25 THz; high aspect ratio metallic pillar arrays; pass band filter; photonic band gap; ultraviolet based SU8 micromachining; Band pass filters; Delamination; Glass; Gold; Micromachining; Optical device fabrication; Photonic band gap; Physics; Resists; Submillimeter wave filters;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location
Shanghai
Print_ISBN
1-4244-0400-2
Electronic_ISBN
1-4244-0400-2
Type
conf
DOI
10.1109/ICIMW.2006.368402
Filename
4222136
Link To Document