• DocumentCode
    2737437
  • Title

    The Fabrication of THz Photonic Filters Using Ultraviolet Based SU8 Micromachining

  • Author

    Gallant, A.J. ; Levitt, J.A. ; Swift, G.P. ; Dai, D.C. ; Kaliteevski, M. ; Wood, D. ; Petty, M.C. ; Chamberlain, J.M.

  • Author_Institution
    Durham Univ., Durham
  • fYear
    2006
  • fDate
    18-22 Sept. 2006
  • Firstpage
    194
  • Lastpage
    194
  • Abstract
    Here we report on the development of an ultraviolet (UV) based exposure technique for the fabrication of high aspect ratio metallic pillar arrays. These arrays act as photonic band gap based filters. Completed structures show a relative transmission of up to 97% in the main pass band centred at 1.25 THz.
  • Keywords
    band-pass filters; micromachining; photonic band gap; submillimetre wave filters; THz photonic filter fabrication; frequency 1.25 THz; high aspect ratio metallic pillar arrays; pass band filter; photonic band gap; ultraviolet based SU8 micromachining; Band pass filters; Delamination; Glass; Gold; Micromachining; Optical device fabrication; Photonic band gap; Physics; Resists; Submillimeter wave filters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    1-4244-0400-2
  • Electronic_ISBN
    1-4244-0400-2
  • Type

    conf

  • DOI
    10.1109/ICIMW.2006.368402
  • Filename
    4222136