Title :
Growth of Feature-Controlled ZnO Nanotube Arrays by Using Patterned Apertures with Hydrothermal Method
Author :
Chao, Cha-Hsin ; Huang, Jing-Shun ; Lin, Ching-Fuh
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei
Abstract :
ZnO nanotube arrays with controlled diameter and density were synthesized on ZnO/Si substrate with thereon two-dimensional periodic polymer aperture arrays at low temperature. The growth behavior of the ZnO nanotube arrays was found to be strongly dependent on the opening of the aperture. An obvious size and density variation of ZnO nanotube arrays with the size of aperture was observed. The detailed growth behavior was characterized and analyzed in this research. This investigation offers a capability to control the formation of single/multiple ZnO nanotube(s) with both size and density onto random substrates for potential optoelectronics applications.
Keywords :
II-VI semiconductors; electron beam lithography; nanolithography; nanopatterning; nanotubes; polymers; semiconductor growth; wide band gap semiconductors; zinc compounds; ZnO; electron beam lithography; feature-controlled nanotube arrays; hydrothermal method; optoelectronics applications; patterned apertures; random substrates; two-dimensional periodic polymer aperture arrays; Apertures; Lithography; Nanostructures; Photonics; Polymers; Size control; Substrates; Surface morphology; Temperature; Zinc oxide;
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
DOI :
10.1109/NANO.2008.53
