DocumentCode

2738555

Title

Pulsed Laser Deposition Of Diamond-like Carbon Film With XeCl Laser

Author

Jinru, L.

Author_Institution

Northwest Institute of Nuclear Technology, China

fYear

1997

fDate

14-18 July 1997

Firstpage

263

Lastpage

263

Keywords

Diamond-like carbon; Gallium nitride; Lithography; Optical films; Optical pulses; Pulsed laser deposition; Substrates; Writing; X-ray diffraction; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on

Conference_Location

Chiba, Japan

Print_ISBN

0-7803-3889-8

Type

conf

DOI

10.1109/CLEOPR.1997.610947

Filename

610947