DocumentCode :
2738579
Title :
Development And Applications Of A Laser Writing Lithography System With Alignment Capability
Author :
Feng-Lan Xu ; Chi-Yi Liaw ; Yuen-Chuen Chan ; Yan Zhou ; Yee-Loy Lam
Author_Institution :
Nanyang Technological University,
fYear :
1997
fDate :
14-18 July 1997
Firstpage :
263
Lastpage :
264
Keywords :
Diamond-like carbon; Gallium nitride; Laser applications; Lithography; Optical films; Optical pulses; Pulsed laser deposition; Substrates; Writing; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-3889-8
Type :
conf
DOI :
10.1109/CLEOPR.1997.610948
Filename :
610948
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2738579
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