DocumentCode
2738590
Title
Direct Writing And Characterization Of Low Resistance Aluminum Line On Aluminum Nitride Ceramics With Tea CO Iaser
Author
Yabe, Hiroyuki ; Taakahashi, Akihisa ; Obara, Minoru
Author_Institution
Keio University
fYear
1997
fDate
14-18 July 1997
Firstpage
264
Lastpage
264
Keywords
Aluminum nitride; Ceramics; Conductors; Electric resistance; Gas lasers; Laser theory; Optical pulses; Pulse circuits; Thermal resistance; Writing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-3889-8
Type
conf
DOI
10.1109/CLEOPR.1997.610949
Filename
610949
Link To Document