• DocumentCode
    2738590
  • Title

    Direct Writing And Characterization Of Low Resistance Aluminum Line On Aluminum Nitride Ceramics With Tea CO Iaser

  • Author

    Yabe, Hiroyuki ; Taakahashi, Akihisa ; Obara, Minoru

  • Author_Institution
    Keio University
  • fYear
    1997
  • fDate
    14-18 July 1997
  • Firstpage
    264
  • Lastpage
    264
  • Keywords
    Aluminum nitride; Ceramics; Conductors; Electric resistance; Gas lasers; Laser theory; Optical pulses; Pulse circuits; Thermal resistance; Writing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics, 1997. CLEO/Pacific Rim '97., Pacific Rim Conference on
  • Conference_Location
    Chiba, Japan
  • Print_ISBN
    0-7803-3889-8
  • Type

    conf

  • DOI
    10.1109/CLEOPR.1997.610949
  • Filename
    610949