Title :
Floating Broad-Band CPW-Fed On-Chip Spiral Antenna Using Silicon Micromachining
Author :
Sedaghat-Pisheh, H. ; Shahabadi, M. ; Mohajerzadeh, S. ; Rabbani, M.
Author_Institution :
Univ. of Tehran, Tehran
Abstract :
Design, simulation, and fabrication of a novel floating broadband coplanar waveguide (CPW)-fed spiral on-chip antenna using silicon micromachining will be presented. Anisotropic etching method used in this work is capable of fabrication of membrane areas as large as 4 mm by 4 mm. Simulation results of the antenna performed using the finite integral technique (FIT).
Keywords :
antenna feeds; broadband antennas; coplanar waveguide components; etching; micromachining; silicon; spiral antennas; FIT; anisotropic etching method; coplanar waveguide; finite integral technique; floating broad-band CPW-fed; on-chip spiral antenna; silicon micromachining; Anisotropic magnetoresistance; Biomembranes; Broadband antennas; Coplanar waveguides; Etching; Integral equations; Micromachining; Optical device fabrication; Silicon; Spirals;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368484
