Title :
Aligned silicon nanowire arrays for achieving black nonreflecting silicon surface
Author :
Hung, Yung-Jr ; Wu, Kai-Chung ; Lee, San-Liang ; Pan, Yen-Ting
Author_Institution :
Dept. of Electron. Eng., Nat. Taiwan Univ. of Sci. & Technol., Taipei, Taiwan
Abstract :
A new fabrication process, which includes deposition of thin silver film on silicon surface prior to wet etching, is proposed for realizing aligned silicon nanowires with high uniformity, resulting in black nonreflecting silicon surface.
Keywords :
elemental semiconductors; etching; metallic thin films; nanofabrication; nanowires; optical fabrication; optical films; semiconductor quantum wires; silicon; silver; Ag-Si; Si; aligned silicon nanowire arrays; black nonreflecting silicon surface; optical fabrication; thin silver film; wet etching; Fabrication; Films; Silicon; Silver; Wet etching; metal-induced Si etching; silicon nanowire array;
Conference_Titel :
Winter Topicals (WTM), 2011 IEEE
Conference_Location :
Keystone, CO
Print_ISBN :
978-1-4244-8428-7
DOI :
10.1109/PHOTWTM.2011.5730046
