Design of High Performance Condenser Microphone Using Interlaced Slot diaphragm Technology

In summary, this study successfully demonstrates the design and implementation of high performance CMOS condenser microphones. Microphone with a flat frequency response between 100 Hz_~20 KHz have been fabricated in a reproducible way. The interlace slots structure not only reduce the intrinsic stress of diaphragm also changing the stiffness of diaphragm and shrink the size of membrane. The major advantage of the new design is that it can be realized on CMOS process and could eliminate wire bond process in future. Further research will be focused on optimization of the sensitivity.