• DocumentCode
    2739350
  • Title

    Optical Power Handling and Thermal Cycling of Optical MEMS

  • Author

    Spahn, Olga Blum ; Phinney, Leslie M. ; Wong, C. Channy ; Cowan, William D. ; Grossetete, Grant D. ; Adams, David P.

  • Author_Institution
    Sandia Nat. Labs., L&M Technol., Albuquerque, NM
  • fYear
    2008
  • fDate
    18-21 Aug. 2008
  • Firstpage
    437
  • Lastpage
    438
  • Abstract
    A number of applications require optical MEMS devices to handle high optical power or thermal variations. We present theoretical and experimental results for SUMMiTTM fabricated mirrors and other structures that illustrate performance limitation and various means of addressing them.
  • Keywords
    aluminium alloys; copper alloys; elemental semiconductors; integrated optics; micro-optomechanical devices; mirrors; silicon; SUMMiT fabricated mirrors; Si-AlCu; optical MEMS; optical power handling; thermal cycling; Gold; Heating; Laser theory; Metallization; Micromechanical devices; Mirrors; Optical devices; Optical interferometry; Optical surface waves; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
  • Conference_Location
    Arlington, Texas
  • Print_ISBN
    978-1-4244-2103-9
  • Electronic_ISBN
    978-1-4244-2104-6
  • Type

    conf

  • DOI
    10.1109/NANO.2008.133
  • Filename
    4617115
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2739350