Experimental Investigation of Micro-fabricated Folded Waveguide Backward Wave Oscillator for Submillimeter Application

Author

So, J.K. ; Shin, Y.M. ; Jang, K.H. ; Won, J.H. ; Srivastava, A. ; Park, G.S. ; Kim, J.H. ; Chang, S.S.

Author_Institution

Seoul Nat. Univ., Seoul

fYear

2006

fDate

18-22 Sept. 2006

Firstpage

315

Lastpage

315

Abstract

Successful two-step X-ray lithography (LIGA) process is demonstrated for the first time for the application to millimeter and submillimeter wave vacuum devices. The experiment of the two-step LIGA-fabricated folded waveguide BWO with a 12 kV electron gun using thermionic cathodes and cold cathodes using carbon nanotubes are being investigated at the frequency of 0.1 THz.

Keywords

LIGA; backward wave oscillators; carbon nanotubes; cold-cathode tubes; electron guns; millimetre wave tubes; submillimetre wave oscillators; submillimetre wave tubes; thermionic cathodes; waveguide components; BWO; LIGA-fabricated folded waveguide; backward wave oscillator; carbon nanotubes; cold cathodes; electron gun; frequency 0.1 THz; microfabricated folded waveguide oscillator; millimeter wave vacuum devices; submillimeter application; submillimeter wave vacuum devices; thermionic cathodes; two-step X-ray lithography; vacuum devices; voltage 12 kV; Carbon nanotubes; Cathodes; Circuit testing; Electron devices; Frequency; Millimeter wave devices; Millimeter wave technology; Oscillators; Submillimeter wave technology; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on

Conference_Location

Shanghai

Print_ISBN

1-4244-0400-2

Electronic_ISBN

1-4244-0400-2

Type

conf

DOI

10.1109/ICIMW.2006.368523

Filename

4222257