Title :
Single c-domain lead titanate thin films for pyroelectric IR sensors
Author :
Wasa, Kiyotaka ; Liu, Frank H M
Author_Institution :
Kyoto Univ. Sakyouku, Kyoto
Abstract :
High sensitive pyroelectric thin films have been grown for IR sensor. The thin films comprise single c-domain/single crystal of lead titanate (PT) fabricated on MgO substrates by a magnetron sputtering at 600degC followed by a rapid cooling. The PT thin films showed pyroelectric coefficient gamma =3x10-8C/cm2 ldr K with voltage sensitivity gamma /epsiv =0.5x10-9C/cm2 ldr K. The sensitivity was one order in magnitude higher than PZT ceramics.
Keywords :
infrared detectors; lead compounds; pyroelectric detectors; sputtered coatings; thin film sensors; MgO; PbTiO3; high-sensitive pyroelectric IR sensors; lead titanate fabrication; magnetron sputtering; pyroelectric coefficient; rapid cooling; single c-domain lead titanate thin films; temperature 600 C; voltage sensitivity; Cooling; Dielectric thin films; Infrared sensors; Pyroelectricity; Sputtering; Stress; Substrates; Thin film sensors; Titanium compounds; Transistors;
Conference_Titel :
Infrared Millimeter Waves and 14th International Conference on Teraherz Electronics, 2006. IRMMW-THz 2006. Joint 31st International Conference on
Conference_Location :
Shanghai
Print_ISBN :
1-4244-0400-2
Electronic_ISBN :
1-4244-0400-2
DOI :
10.1109/ICIMW.2006.368560
