A Laguerre polynomial approach to surface acoustic wave propagation in multilayered structures

Author

Kim, Yoonkee ; Hunt, William D.

Author_Institution

Georgia Inst. of Technol., Atlanta, GA, USA

fYear

1990

fDate

4-7 Dec 1990

Firstpage

179

Abstract

The Laguerre polynomial technique is presented as a technique for analyzing surface acoustic waves (SAWs) propagating in a general multilayered structure. The explicit equations for the field distributions (particle displacement, electric potential, stress, and electric displacement), SAW velocity, and transmitted power are derived for open- and short-circuit surfaces. The effectiveness of this method is checked by calculating the SAW velocity of a ZnO film on a silicon substrate. Numerical results are also given for GaAs/AlGaAs multilayered structures

Keywords

II-VI semiconductors; aluminium compounds; gallium arsenide; piezoelectric semiconductors; piezoelectric thin films; polynomials; semiconductor superlattices; semiconductor thin films; surface acoustic waves; zinc compounds; AlGaAs; GaAs; GaAs-AlGaAs multilayers; II-VI semiconductors; III-V semiconductors; Laguerre polynomial approach; SAW velocity; Si substrate; ZnO film; electric displacement; electric potential; field distributions; multilayered structures; open-circuit surfaces; particle displacement; short-circuit surfaces; stress; surface acoustic wave propagation; transmitted power; Acoustic propagation; Acoustic waves; Electric potential; Equations; Polynomials; Sawing machines; Semiconductor films; Stress; Surface acoustic waves; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1990. Proceedings., IEEE 1990

Conference_Location

Honolulu, HI

Type

conf

DOI

10.1109/ULTSYM.1990.171348

Filename

171348