Interdigitated Array Electrodes with Nano Gaps Using Optical Lithography and Controlled Undercut Method

Author

Shim, Joon S. ; Rust, Michael J. ; Ahn, Chong H.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Cincinnati, Cincinnati, OH

fYear

2008

fDate

18-21 Aug. 2008

Firstpage

851

Lastpage

854

Abstract

Interdigitated array (IDA) electrodes with nano-gaps were fabricated using a newly developed optical lithography and controlled undercut method. Nano gaps of 250 nm between electrodes were developed while maintaining a large electrode area. The developed electrodes with nano gaps were applied as an electrochemical biosensor for the detection of poly-aminophenol (PAP) with 10^-7 M detection limit. This method may enable the mass-production of disposable biosensors based on the nano-gap IDA electrodes.

Keywords

biomedical electrodes; biosensors; electrochemical sensors; lab-on-a-chip; nanobiotechnology; nanostructured materials; organic compounds; photolithography; controlled undercut method; disposable biosensors; electrochemical biosensor; interdigitated array electrodes; mass production; nanogap IDA electrodes; optical lithography; poly-aminophenol; size 250 nm; Biomedical optical imaging; Biosensors; Cathodes; Costs; Electrodes; Fabrication; Lithography; Optical arrays; Optical control; Sensor arrays;

fLanguage

English

Publisher

ieee

Conference_Titel

Nanotechnology, 2008. NANO '08. 8th IEEE Conference on

Conference_Location

Arlington, TX

Print_ISBN

978-1-4244-2103-9

Electronic_ISBN

978-1-4244-2104-6

Type

conf

DOI

10.1109/NANO.2008.254

Filename

4617236