Title :
Interdigitated Array Electrodes with Nano Gaps Using Optical Lithography and Controlled Undercut Method
Author :
Shim, Joon S. ; Rust, Michael J. ; Ahn, Chong H.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Cincinnati, Cincinnati, OH
Abstract :
Interdigitated array (IDA) electrodes with nano-gaps were fabricated using a newly developed optical lithography and controlled undercut method. Nano gaps of 250 nm between electrodes were developed while maintaining a large electrode area. The developed electrodes with nano gaps were applied as an electrochemical biosensor for the detection of poly-aminophenol (PAP) with 10-7 M detection limit. This method may enable the mass-production of disposable biosensors based on the nano-gap IDA electrodes.
Keywords :
biomedical electrodes; biosensors; electrochemical sensors; lab-on-a-chip; nanobiotechnology; nanostructured materials; organic compounds; photolithography; controlled undercut method; disposable biosensors; electrochemical biosensor; interdigitated array electrodes; mass production; nanogap IDA electrodes; optical lithography; poly-aminophenol; size 250 nm; Biomedical optical imaging; Biosensors; Cathodes; Costs; Electrodes; Fabrication; Lithography; Optical arrays; Optical control; Sensor arrays;
Conference_Titel :
Nanotechnology, 2008. NANO '08. 8th IEEE Conference on
Conference_Location :
Arlington, TX
Print_ISBN :
978-1-4244-2103-9
Electronic_ISBN :
978-1-4244-2104-6
DOI :
10.1109/NANO.2008.254
