Investigate on Characteristics of Gas Film Damping of Capacitive Micro Accelerometers

Author

Wang, Weidong ; Jia, Jianyuan ; Zhang, Daxing

Author_Institution

Sch. of Electro-Mech. Eng., Xidian Univ., Xi´´an

Volume

2

fYear

0

fDate

0-0 0

Firstpage

8349

Lastpage

8351

Abstract

Basing on the rarefied gas dynamics theory and the squeeze film Reynolds equation amended with slip flow boundary condition, the gas film damping effects on the sensitive proof mass, moving along its axial direction, are analyzed for capacitive micro accelerometers. Simplified analysis solutions are obtained for damping force and damping coefficient. Also it shows that gas film damping force is related not only to the accelerometer dimensions and velocity of proof mass, but also to the factors, such as solid wall material, surface roughness, smooth finish, and so on. Finally, it is shown that gas film damping, especially for squeezed-damping, is seriously influenced by Maxwell´s reflection coefficient, which needs to be further investigated and analyzed

Keywords

accelerometers; aerodynamics; damping; flow; Maxwell reflection coefficient; Reynolds equation; accelerometer dimension; capacitive micro accelerometer; gas film damping force; proof mass velocity; rarefied gas dynamics theory; slip flow boundary condition; squeeze film; squeezed damping coefficient; Accelerometers; Boundary conditions; Damping; Equations; Optical films; Reflection; Rough surfaces; Solids; Surface finishing; Surface roughness; Capacitive accelerometer; Damping coefficient; Gas film damping;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on

Conference_Location

Dalian

Print_ISBN

1-4244-0332-4

Type

conf

DOI

10.1109/WCICA.2006.1713604

Filename

1713604