Design and Control of a Piezoelectric Ceramic-actuated and Flexure Hinge-based Micromanipulator

Author

Ji, Hua-wei ; Yang, Shi-xi ; Wu, Zhao-tong ; Ye, Hongxian

Author_Institution

Dept. of Mech. Eng., Zhejiang Univ., Hangzhou

Volume

2

fYear

0

fDate

0-0 0

Firstpage

8393

Lastpage

8396

Abstract

This paper presented a novel piezoelectric ceramic-actuated and flexure hinge-based micromanipulator, a compound four-bar parallel configuration was designed to eliminate parasite displacement and decrease concentrated stress, and finite element simulation verified the proposed micromanipulator to be a no parasite displacement and little concentrated one. In addition, a non-linear model based on support vector machine for regression was proposed to describe nonlinearity of piezoelectric actuator, and a hybrid controller consists of a model based feed-forward controller and a self-tuning PID feedback controller was presented to improve control precision. Tracking experiment results indicate the proposed micromanipulator has good performance for precise tracking control

Keywords

adaptive control; control nonlinearities; control system synthesis; finite element analysis; flexible manipulators; micromanipulators; neurocontrollers; nonlinear control systems; piezoceramics; piezoelectric actuators; precision engineering; regression analysis; self-adjusting systems; support vector machines; concentrated stress; feedforward controller; finite element simulation; flexure hinge-based micromanipulator; hybrid controller; nonlinear model; parallel configuration; parasite displacement; piezoelectric actuator nonlinearity; piezoelectric ceramic-actuated micromanipulator; precision control; regression; self-tuning PID feedback controller; support vector machine; tracking control; Adaptive control; Fasteners; Finite element methods; Micromanipulators; Optical microscopy; Piezoelectric actuators; Stress; Support vector machines; Three-term control; Topology; flexure hinge; piezoelectric actuator; precision control; support vector machine for regression;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Control and Automation, 2006. WCICA 2006. The Sixth World Congress on

Conference_Location

Dalian

Print_ISBN

1-4244-0332-4

Type

conf

DOI

10.1109/WCICA.2006.1713614

Filename

1713614