Design and Control of a Piezoelectric Ceramic-actuated and Flexure Hinge-based Micromanipulator

This paper presented a novel piezoelectric ceramic-actuated and flexure hinge-based micromanipulator, a compound four-bar parallel configuration was designed to eliminate parasite displacement and decrease concentrated stress, and finite element simulation verified the proposed micromanipulator to be a no parasite displacement and little concentrated one. In addition, a non-linear model based on support vector machine for regression was proposed to describe nonlinearity of piezoelectric actuator, and a hybrid controller consists of a model based feed-forward controller and a self-tuning PID feedback controller was presented to improve control precision. Tracking experiment results indicate the proposed micromanipulator has good performance for precise tracking control