Title :
Research on hybrid device of Si microlens arrays with long focus and IR detector arrays
Author :
Chen Sihai ; Yi Xinjian ; He Miao ; Zhang Xinyu
Author_Institution :
State Key Lab. of Laser Technol., Huazhong Univ. of Sci. & Technol., Wuhan, China
Abstract :
A new method, named step simulation, is proposed to fabricate refractive 128/spl times/128 element Si microlens (MLS) arrays for hybrid integration with PtSi IR Focal Plane Arrays (FPAs). By the method, the focal length of rectangle-based multilevel Si MLS arrays is over 1 millimeter, much longer than typical focal length of MLS array fabricated by conventional binary optics Fresnel technique. Si MLS arrays and IR FPAs are coupled with infrared glue. The IR responsivity of the hybrid device is improved significantly.
Keywords :
focal planes; infrared detectors; microlenses; optical arrays; simulation; IR detector arrays; IR focal plane arrays; IR responsivity; PtSi; PtSi IR FPA; Si; Si microlens arrays; hybrid device; long focus; rectangle-based multilevel arrays; step simulation; Apertures; Focusing; Infrared detectors; Lenses; Multilevel systems; Optical arrays; Optical refraction; Optical surface waves; Optical variables control; Sensor arrays;
Conference_Titel :
Infrared and Millimeter Waves, 2000. Conference Digest. 2000 25th International Conference on
Conference_Location :
Beijing, China
Print_ISBN :
0-7803-6513-5
DOI :
10.1109/ICIMW.2000.892974
