• DocumentCode
    2743677
  • Title

    Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities

  • Author

    Tan, Tran Duc ; Anh, Naguyen Tien

  • Author_Institution
    Dept. of MEMS, Univ. of Eng. & Technol. (UET), Ha Noi, Vietnam
  • fYear
    2011
  • fDate
    25-27 Jan. 2011
  • Firstpage
    395
  • Lastpage
    399
  • Abstract
    A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.
  • Keywords
    accelerometers; microsensors; piezoresistive devices; MEMS; micro electro mechanical systems; piezoresistive accelerometer; uniform axial sensitivity; Decision support systems; Intelligent systems; MEMS; accelerometer; piezoresistance; simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Intelligent Systems, Modelling and Simulation (ISMS), 2011 Second International Conference on
  • Conference_Location
    Kuala Lumpur
  • Print_ISBN
    978-1-4244-9809-3
  • Type

    conf

  • DOI
    10.1109/ISMS.2011.66
  • Filename
    5730380
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2743677