Title :
Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities
Author :
Tan, Tran Duc ; Anh, Naguyen Tien
Author_Institution :
Dept. of MEMS, Univ. of Eng. & Technol. (UET), Ha Noi, Vietnam
Abstract :
A three-axis piezoresistive accelerometer which has uniform sensitivities to three axes was developed using Micro Electro Mechanical Systems (MEMS) technology. This sensor which is made of a heavy proof mass and four long beams allow us to obtain high sensitivities by reducing the resonant frequencies. Uniform axial sensitivities with small cross axis sensitivity could be obtained by a three-dimensional sensor structure.
Keywords :
accelerometers; microsensors; piezoresistive devices; MEMS; micro electro mechanical systems; piezoresistive accelerometer; uniform axial sensitivity; Decision support systems; Intelligent systems; MEMS; accelerometer; piezoresistance; simulation;
Conference_Titel :
Intelligent Systems, Modelling and Simulation (ISMS), 2011 Second International Conference on
Conference_Location :
Kuala Lumpur
Print_ISBN :
978-1-4244-9809-3
DOI :
10.1109/ISMS.2011.66
