Title :
All-silicon plate wave oscillator system for sensor applications
Author :
Vellekoop, M.J. ; van Rhijn, A.J. ; Lubking, G.W. ; Venema, A.
Author_Institution :
Delft Univ. of Technol., Netherlands
Abstract :
The authors present the design and realization of an all-silicon acoustic plate wave oscillator system for sensor applications. The plate wave device and the electronic circuitry have been fabricated in two separate silicon chips. The plate wave device embodies a silicon membrane covered with piezoelectric zinc oxide. For protection of the zinc oxide, a thin silicon nitride layer is deposited on top
Keywords :
acoustoelectric devices; crystal resonators; electric sensing devices; elemental semiconductors; silicon; surface acoustic wave devices; Si-SiO2-ZnO-Si3N4; all Si plate; design; plate wave oscillator system; sensor applications; Acoustic applications; Acoustic devices; Acoustic sensors; Acoustic waves; Biomembranes; Circuits; Oscillators; Sensor systems and applications; Silicon; Zinc oxide;
Conference_Titel :
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location :
Honolulu, HI
DOI :
10.1109/ULTSYM.1990.171367
