Title :
Micromachined coplanar waveguides on thin HMDSN-membranes
Author :
Duwe, K. ; Hirsch, S. ; Judaschke, R. ; Muller, J.
Author_Institution :
Arbeitsbereich Halbleitertechnol., Tech. Univ. Hamburg-Harburg, Germany
Abstract :
This paper describes the fabrication of coplanar waveguides on thin dielectric membranes. The membranes deposited from hexamethyldisilazane were fabricated by structuring the underlying silicon with micromachining techniques. A transition from membrane-based coplanar waveguide to silicon-based coplanar waveguide for Ka-band has been designed, fabricated and characterized. A transition from membrane-based coplanar waveguide to rectangular waveguide has been evaluated and realised for D-band.
Keywords :
coplanar waveguides; membranes; micromachining; organic compounds; rectangular waveguides; waveguide transitions; D-band; HMDSN film; Ka-band; Si; coplanar waveguide; dielectric membrane; fabrication; hexamethyldisilazane; micromachining; rectangular waveguide; silicon substrate; waveguide transition; Biomembranes; Coplanar waveguides; Dielectric substrates; Etching; Plasma applications; Plasma measurements; Plasma waves; Rectangular waveguides; Silicon; Waveguide transitions;
Conference_Titel :
Infrared and Millimeter Waves, 2000. Conference Digest. 2000 25th International Conference on
Conference_Location :
Beijing, China
Print_ISBN :
0-7803-6513-5
DOI :
10.1109/ICIMW.2000.893040
