DocumentCode
2744341
Title
Micromachined coplanar waveguides on thin HMDSN-membranes
Author
Duwe, K. ; Hirsch, S. ; Judaschke, R. ; Muller, J.
Author_Institution
Arbeitsbereich Halbleitertechnol., Tech. Univ. Hamburg-Harburg, Germany
fYear
2000
fDate
12-15 Sept. 2000
Firstpage
297
Lastpage
298
Abstract
This paper describes the fabrication of coplanar waveguides on thin dielectric membranes. The membranes deposited from hexamethyldisilazane were fabricated by structuring the underlying silicon with micromachining techniques. A transition from membrane-based coplanar waveguide to silicon-based coplanar waveguide for Ka-band has been designed, fabricated and characterized. A transition from membrane-based coplanar waveguide to rectangular waveguide has been evaluated and realised for D-band.
Keywords
coplanar waveguides; membranes; micromachining; organic compounds; rectangular waveguides; waveguide transitions; D-band; HMDSN film; Ka-band; Si; coplanar waveguide; dielectric membrane; fabrication; hexamethyldisilazane; micromachining; rectangular waveguide; silicon substrate; waveguide transition; Biomembranes; Coplanar waveguides; Dielectric substrates; Etching; Plasma applications; Plasma measurements; Plasma waves; Rectangular waveguides; Silicon; Waveguide transitions;
fLanguage
English
Publisher
ieee
Conference_Titel
Infrared and Millimeter Waves, 2000. Conference Digest. 2000 25th International Conference on
Conference_Location
Beijing, China
Print_ISBN
0-7803-6513-5
Type
conf
DOI
10.1109/ICIMW.2000.893040
Filename
893040
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