DocumentCode
2744998
Title
Photoluminescence of Porous Silicon Layers Oxidized in Controlled Water Vapor Conditions.
Author
Vásquez-A, M.A. ; García-Salgado, G. ; Romero-Paredes, G. ; Pena-Sierra, R.
Author_Institution
Dept. de Ingenieria Electrica, CINVESTAV-IPN, Mexico City
fYear
2006
fDate
6-8 Sept. 2006
Firstpage
1
Lastpage
4
Abstract
A study of the evolution of the photoluminescence spectra features on chemically treated and controlled aged porous silicon layers (PSL) prepared by the electrochemical method is presented. Room temperature photoluminescence (PL) spectra of freshly prepared PSL show a characteristic peak located at ~700 nm. The PL spectrum of chemically oxidized and successively water vapor oxidized PSL strongly modifies compared to the PL spectra of freshly prepared samples. Those variations are associated with the changes on the PSL structure induced by the applied oxidization processes. The evolution of the characteristic PL features gives us the ability to identify the signal due to the quantum size effect (QSE) and to assign high energy transitions produced by some kind of defect centers
Keywords
elemental semiconductors; oxidation; photoluminescence; point defects; porous semiconductors; semiconductor thin films; silicon; size effect; 293 to 298 K; Si; chemically treated porous silicon layers; controlled aged porous silicon layers; controlled water vapor conditions; defect centers; electrochemical method; high energy transitions; optical properties; oxidization processes; oxidized porous silicon layers; point defects; quantum size effect; room temperature photoluminescence spectra; thin films; Chemicals; Etching; Luminescence; Optical films; Photoluminescence; Process control; Semiconductor films; Silicon; Surface morphology; Temperature measurement; Optical properties; photoluminescence; point defects; porous silicon; thin films;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location
Veracruz
Print_ISBN
1-4244-0402-9
Electronic_ISBN
1-4244-0403-7
Type
conf
DOI
10.1109/ICEEE.2006.251918
Filename
4018003
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