DocumentCode
2745278
Title
Process Innovation For Future Semiconductor Industry
Author
Ogirima, M.
Author_Institution
Hitachi, Ltd.
fYear
1993
fDate
17-19 May 1993
Firstpage
1
Lastpage
5
Abstract
During the last few years, the semiconductor industry has been gradually deviating from its traditional course. This change seems to be due to the diversification of market needs and to technical difficulties. To break through to future technological generations, new device and process concepts must be introduced . This paper discusses several innovative processes for future developments in the semiconductor industry, It suggests that material innovation is important for simplifying device structure and lowering costs.
Keywords
Electronics industry; Large scale integration; Market research; Materials; Metallization; Random access memory;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location
Kyoto, Japan
Type
conf
DOI
10.1109/VLSIT.1993.760218
Filename
760218
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