DocumentCode
2745568
Title
SAW resonators as vapor sensors
Author
Watson, G. ; Staples, E.
Author_Institution
Amerasia Technol. Inc., Westlake Village, CA, USA
fYear
1990
fDate
4-7 Dec 1990
Firstpage
311
Abstract
The application of SAW (surface acoustic wave) resonators as substance-of-abuse vapor sensors is described. High-Q SAW resonators configured as vapor/mass detectors are an optimally sensitive SAW geometry. The SAW resonator is able to achieve sensitivities approaching femtogram levels and exhibits a nearly true fourth-order sensitivity vs. frequency dependence. Detection of drugs at the 1-10 femtogram level was achieved. Scale factors of 20000 Hz/nanogram have been achieved by using very-high-frequency SAW resonators and by confining the depositions to the active area of the resonators
Keywords
chemical analysis; crystal resonators; gas sensors; surface acoustic wave devices; ultrasonic applications; ultrasonic delay lines; SAW resonators; VHF resonators; drug detection; femtogram level; fourth-order sensitivity; substance-of-abuse vapor sensors; Delay lines; Detectors; Electrodes; Frequency; Geometry; Methanol; Sensor phenomena and characterization; Solvents; Surface acoustic waves; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1990. Proceedings., IEEE 1990
Conference_Location
Honolulu, HI
Type
conf
DOI
10.1109/ULTSYM.1990.171375
Filename
171375
Link To Document