DocumentCode :
2745710
Title :
An Ultra-low Thermal-budget SiGe-base Bipolar Technology
Author :
Burghartz, J.N. ; Grutzmacher, D.A. ; Sedgwick, T.O. ; Jenkins, K.A. ; Megdanis, A.C. ; Cotte, J.M. ; Nguyen-Ngoc, D. ; Iyer, S.S.
Author_Institution :
IBM Semiconductor Research
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
59
Lastpage :
60
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760244
Filename :
760244
Link To Document :
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