Title :
Asymmetric strip-loaded slot waveguides and its applications in silicon-polymer hybrid electro-optic modulators
Author :
Ding, Ran ; Baehr-Jones, Tom ; Kim, Woo-Joong ; Boyko, Bryan ; Bojko, Richard ; Spott, Alexander ; Pomerene, Andrew ; Hill, Craig ; Reinhardt, Wesley ; Hochberg, Michael
Author_Institution :
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
A new class of electrically contactable slot waveguides are discussed regarding its unique advantages for building high-performance electro-optic modulators. 2dB/cm waveguide losses near 1550nm were achieved with devices fabricated in silicon-on-insulator with 248nm photolithography.
Keywords :
electro-optical modulation; integrated optics; optical fabrication; optical losses; optical polymers; optical waveguides; photolithography; silicon-on-insulator; Si; asymmetric strip-loaded slot waveguides; electrically contactable slot waveguide losses; photolithography; silicon-on-insulator; silicon-polymer hybrid electro-optic modulators; wavelength 248 nm; Electrooptic modulators; Electrooptical waveguides; Optical losses; Optical sensors; Propagation losses;
Conference_Titel :
Photonics Conference (PHO), 2011 IEEE
Conference_Location :
Arlington, VA
Print_ISBN :
978-1-4244-8940-4
DOI :
10.1109/PHO.2011.6110431
