DocumentCode

2746072

Title

Sub-Quarter-Micron PMOSFETs With Shallow Source And Drain Formed By Rapid Vapor-phase Doping (RVD)

Author

Kiyota, Y. ; Nakamura, T. ; Inada, T.

Author_Institution

Hitachi Ltd.

fYear

1993

fDate

17-19 May 1993

Firstpage

97

Lastpage

98

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

conf

DOI

10.1109/VLSIT.1993.760263

Filename

760263