DocumentCode
2746121
Title
18 SEM2 Semiconductor Materials
fYear
2006
fDate
6-8 Sept. 2006
Firstpage
54
Lastpage
56
Abstract
Summary form only for tutorial.
Keywords
Annealing; Nitrogen; Optical films; Photoluminescence; Rough surfaces; Semiconductor films; Semiconductor materials; Silicon; Surface morphology; Surface roughness;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location
Veracruz
Print_ISBN
1-4244-0402-9
Type
conf
DOI
10.1109/ICEEE.2006.251837
Filename
4018065
Link To Document