Title :
20 SSE2 Solid-State Electronics and VLSI
Abstract :
Summary form only for tutorial.
Keywords :
Annealing; Atmosphere; Electric resistance; Gas detectors; Gold; Semiconductor thin films; Silicon; Solid modeling; Solid state circuits; Very large scale integration;
Conference_Titel :
Electrical and Electronics Engineering, 2006 3rd International Conference on
Conference_Location :
Veracruz
Print_ISBN :
1-4244-0402-9
DOI :
10.1109/ICEEE.2006.251839
