مرکز منطقه ای اطلاع رساني علوم و فناوري - Ecologically-Safe Ionized Water Treatment For Wafer Processing

DocumentCode :

2746157

Title :

Ecologically-Safe Ionized Water Treatment For Wafer Processing

Author :

Aoki, H. ; Nakamori, M. ; Aoto, N. ; Ikawa, E.

Author_Institution :

NEC Corporation

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

107

Lastpage :

108

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760268

Filename :

760268

Link To Document :