Insitu Pyrochemical Wafer Cleaning For Furnace Processing

Author

Bich-Yen Nguyen ; Young Limb ; Tobin, P.J. ; Huffman ; Kouba, C. ; Gonzales, S. ; Le La

Author_Institution

Motorola

fYear

1993

fDate

17-19 May 1993

Firstpage

109

Lastpage

110

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location

Kyoto, Japan

Type

DOI

10.1109/VLSIT.1993.760269

Filename

760269

Link To Document