مرکز منطقه ای اطلاع رساني علوم و فناوري - A Manufacturable Chemical-Mechanical Polish Technology With A Novel Low-Permittivity Stop-Layer For Oxide Polishing

DocumentCode :

2746241

Title :

A Manufacturable Chemical-Mechanical Polish Technology With A Novel Low-Permittivity Stop-Layer For Oxide Polishing

Author :

Poon, S. ; Gelatos, A. ; Perera, A.H. ; Hoffman, M.

Author_Institution :

Motorola Inc.

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

115

Lastpage :

116

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760272

Filename :

760272

Link To Document :