مرکز منطقه ای اطلاع رساني علوم و فناوري - Surface Control for ULSIs (Atomic Order Planarization of Si Surfaces)

DocumentCode :

2746281

Title :

Surface Control for ULSIs (Atomic Order Planarization of Si Surfaces)

Author :

Yabumoto ; Sinha, Aloka

Author_Institution :

NTT

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

118

Lastpage :

119

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760275

Filename :

760275

Link To Document :