DocumentCode :
2746379
Title :
Improved Interconnect Yield Through Surface Control By Silylation (SCS) Method
Author :
Yano, K. ; Yamanaka, M. ; Terai, Y. ; Sugiyama, T. ; Kubota, M. ; Endo, M. ; Nomura, N.
Author_Institution :
Matsushita Electric Industrial Co.,Ltd.
fYear :
1993
fDate :
17-19 May 1993
Firstpage :
129
Lastpage :
130
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on
Conference_Location :
Kyoto, Japan
Type :
conf
DOI :
10.1109/VLSIT.1993.760282
Filename :
760282
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2746379