مرکز منطقه ای اطلاع رساني علوم و فناوري - Improved Interconnect Yield Through Surface Control By Silylation (SCS) Method

DocumentCode :

2746379

Title :

Improved Interconnect Yield Through Surface Control By Silylation (SCS) Method

Author :

Yano, K. ; Yamanaka, M. ; Terai, Y. ; Sugiyama, T. ; Kubota, M. ; Endo, M. ; Nomura, N.

Author_Institution :

Matsushita Electric Industrial Co.,Ltd.

fYear :

1993

fDate :

17-19 May 1993

Firstpage :

129

Lastpage :

130

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Technology, 1993. Digest of Technical Papers. 1993 Symposium on

Conference_Location :

Kyoto, Japan

Type :

conf

DOI :

10.1109/VLSIT.1993.760282

Filename :

760282

Link To Document :